靶材和蒸发材料
| SINGLE ELEMENTS 单质材料 | |
|---|---|
| Aluminum (Al) | Nickel (Ni) |
| Antimony (Sb) | Niobium (Nb) |
| Arsenic (As) | Osmium (Os) |
| Barium (Ba) | Palladium (Pd) |
| Beryllium (Be) | Platinum (Pt) |
| Boron (B) | Rhenium (Re) |
| Cadmium (Cd) | Rhodium (Rh) |
| Carbon (C) | Rubidium (Rb) |
| Chromium (Cr) | Ruthenium (Ru) |
| Cobalt (Co) | Selenium (Se) |
| Copper (Cu) | Silicon (Si) |
| Gallium (Ga) | Silver (Ag) |
| Germanium (Ge) | Tantalum (Ta) |
| Gold (Au) | Tellurium (Te) |
| Hafnium (Hf) | Tin (Sn) |
| Indium (In) | Titanium (Ti) |
| Iridium (Ir) | Tungsten (W) |
| Iron (Fe) | Vanadium (V) |
| Lead (Pb) | Yttrium (Y) |
| Magnesium (Mg) | Zinc (Zn) |
| Manganese (Mn) | Zirconium (Zr) |
| Molybdenum (Mo) | |
| PRECIOUS METALS 贵重金属 | |
|---|---|
| Gold (Au) | Palladium (Pd) |
| Silver (Ag) | Platinum (Pt) |
| Gold Arsenic (AuAs) | Rhenium (Re) |
| Gold Tin (AuSn) | Rhodium (Rh) |
| Iridium (Ir) | Ruthenium (Ru) |
| Osmium (Os) | |
| ALLOYS & INTERMETALLICS 合金和金属化合物 | |
|---|---|
| Aluminum-Silver ( AlAg) | Cobalt-Iron (CoFe) |
| Aluminum-Cobalt ( AlCo) | Cobalt-Nickel (CoNi) |
| Aluminum-Chromium ( AlCr) | Gold-Germanium (AuGe) |
| Aluminum-Iron ( AlFe) | Gold-Tin (AuSn) |
| Aluminum-Indium ( Al/In) | Gold-Zinc (AuZn) |
| Aluminum- Magnesium (Al/Mg) | Hafnium-Lanthanum (Hf/La) |
| Aluminum-Copper (AlCu) | Manganese- Iridium (Mn/Ir) |
| Aluminum-Gold (AlAu) | Nickel-Chromium (NiCr) |
| Aluminum-Boron (AlB) | Nickel-Chromium-Iron (NiCrFe) |
| Aluminum-Silicon (AlSi) | Nickel-Iron (NiFe) |
| Aluminum-Silicon-Copper (AlSiCu) | Nickel-Titanium (NiTi) |
| Aluminum- Zirconium ( AlZr) | Nickel-Vanadium (NiV) |
| Chromium-Iron (CrFe) | Nickel-Zirconium (NiZr) |
| Chromium-Silicon (CrSi) | Tungsten-Titanium (WTi) |
| CARBIDES 碳化物 | |
|---|---|
| Aluminum Carbide (Al4C3) | Tantalum Carbide (TaC) |
| Boron Carbide (B4C) | Titanium Carbide (TiC) |
| Chromium Carbide (Cr3C2) | Tungsten-Cobalt Carbide (WC-Co) |
| Hafnium Carbide (HfC) | Tungsten Carbide (WC) |
| Molybdenum Carbide (Mo2C) | Vanadium Carbide (VC) |
| Niobium Carbide (NbC) | Zirconium Carbide (ZrC) |
| Silicon Carbide (SiC) | |
| FLUORIDES 氟化物 | |
|---|---|
| Aluminum Fluoride (AlF3) | Lead Fluoride (PbF2) |
| Barium Fluoride (BaF2) | Lithium Fluoride (LiF) |
| Cadmium Fluoride (CdF2) | Magnesium Fluoride (MgF2) |
| Calcium Fluoride (CaF2) | Cryolite (Na3AlF6) |
| Cerium Fluoride (CeF2) | Yttrium Fluoride (YF3) |
| Hafnium Fluoride (HfF4) | Zirconium Fluoride (ZrF4) |
| SILICIDES 硅化物 | |
|---|---|
| Chromium Silicide (CrSi2) | Tantalum Silicide (TaSi2) |
| Hafnium Silicide (HfSi2) | Titanium Silicide (TiSi2) |
| Molybdenum Silicide (MoSi2) | Tungsten Silicide (WSi2) |
| Niobium Silicide (NbSi2) | |
| BORIDES 硼化物 | |
|---|---|
| Aluminum Boride(AlB2) | Rare Earth Borides |
| Chromium Boride (CrB) | Tantalum Boride (TaB2) |
| Hafnium Boride (HfB2) | Titanium Boride (TiB2) |
| Lanthanum Boride (LaB6) | Tungsten Boride (W2B) |
| Molybdenum Boride (MoB) | Vanadium Boride (VB2) |
| Niobium Boride (NbB) | Zirconium Boride (ZrB2) |
| Nitrides 氮化物 | |
|---|---|
| Aluminum Nitride, AlN | Titanium Nitride, TiN |
| Boron Nitride, BN | Vanadium Nitride, VN |
| Niobium Nitride, NbN | Zirconium Nitride, ZrN |
| Silicon Nitride, Si(3)N(4) | Si(3)N(4)/TiN |
| Tantalum Nitride, TaN | |
| SELENIDES, SULFIDES & TELLURIDES 硒化物、硫化物和碲化物 | |
|---|---|
| Antimony Sulfide (Sb2S3) | Lead Telluride (PbTe) |
| Antimony Selenide (Sb2Se3) | Molybdenum Selenide (MoSe2) |
| Antimony Telluride (Sb2Te3) | Molybdenum Sulfide (MoS2) |
| Arsenic Sulfide (As2S3) | Niobium Selenide (NbSe2) |
| Bismuth Selenide (Bi2Se3) | Niobium Sulfide (NbS) |
| Bismuth Telluride (Bi2Te) | Tantalum Selenide (Ta Se2) |
| Cadmium Selenide (CdSe) | Tantalum Sulfide (TaS2) |
| Cadmium Sulfide (CdS) | Tin Selenide (SnSe) |
| Cadmium Sulfoselenide (CdSSe) | Tin Telluride (SnTe) |
| Cadmium Telluride (CdTe) | Tungsten Selenide (Se2W) |
| Copper Selenide (Cu2Se) | Tungsten Sulfide (WS2) |
| Indium Telluride (In2Te3) | Zinc Selenide (ZnSe) |
| Lead Sulfide, PbS | Zinc Sulfide (ZnS) |
| Lead Selenide (PbSe) | |
| OXIDES 氧化物 | |
|---|---|
| Aluminum Oxide (Al2O3) | Magnesium Oxide (MgO) |
| Antimony Oxide (Sb2O3) | Magnesium-Aluminum Oxide (MgAl2O4) |
| Barium Titanate (BaTiO3) | Magnesium-Zirconium Oxide (MgZrO3) |
| Bismuth Oxide (Bi2O3) | Molybdenum Oxide (MoO3) |
| Bismuth Titanate (Bi2Ti4O11) | Nickel-Chrome Oxide (CrNiO4) |
| Cerium Oxide (CeO2) | Nickel-Cobalt Oxide （NiCoO2） |
| Cobalt-Chrome Oxide (CoCr2O4) | Niobium Pentoxide (Nb2O5) |
| Chromium Oxide (Cr2O3) | Rare Earth Garnets A3B2(SiO4）3 |
| Chromium Oxide (Eu doped) | Rare Earth Oxides (La2O3) |
| Gallium Oxide (Ga2O3) | Silicon Dioxide (SiO2) |
| Germanium Oxide (GeO3) | Silicon Monoxide (SiO) |
| Hafnium Oxide (HfO2) | Tantalum Pentoxide (Ta2O5) |
| Indium Oxide (In2O3) | Tin Oxide (SnO2) |
| Indium-Tin Oxide (ITO) | Titanium Dioxide (TiO2) |
| Iron Oxide (Fe2O3) | Tungsten Oxide (WO3) |
| Lanthanum Oxide(La2O3) | Yttrium Oxide (Y2O3) |
| Lead Titanate(PbTiO3) | Yttrium-Aluminum Oxide (Y3Al5O12) |
| Lead Zirconate (ZrPbO3) | Zinc Oxide (ZnO) |
| Lithium Niobate (LiNbO3) | Zinc Oxide/Aluminum Oxide (Al2O3) |
| Lithium-Cobalt Oxide (CoLiO2) | Zirconium Oxide (ZrO2) |
| Lutetium-Iron Oxide (garnet) (Fe2LuO4) | Zirconium-Magnesium Oxide(ZrMgO3) |
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